We provide a reliable competitive PVD process production solution to deposit PZT thin films on 4-6” wafers. Compared to other techniques (like Sol Gel) we deliver stable quality with highly reduced throughput times. Through demo processing & close collaboration our team supports Piezo based MEMS development and a smooth integration in the existing production line. Our services We support customers ranging from; Universities, R&D facilities, Foundries to End Users. In short we divide our services in two main categories: Customers who are developing Piezo based MEMS applications are often searching for reliable and functional PZT thin films. We provide not only high quality PZT thin films, but also share our knowledge and expertise as well as give advice on the PZT composition for each specific device. In these joint development projects we will customize our PZT process solution for optimal functionality in the desired application. In the search for quality, stable and cost efficient PZT, we can provide the alternative production solution. Our unique PVD technology is highly competitive compared to standard HVM technologies. Through demo processing & close collaboration, we can not only meet the industry requirements, but also support a smooth process integration in the existing production line. Analysis For all wafers we provide the option for functional analysis of the processed PZT layers. To characterize the Piezo properties as well as thin film quality, dedicated equipment is used to determine the d33, d31, e31f, as well as the crystal structure, texture and orientation. Electromechanical thin film properties are key characteristics for the design and layout of piezoelectric based MEMS devices. Either the longitudinal piezoelectric coefficient d33 or the transversal piezoelectric coefficient e31 is used for the realization of the sensor or actuator functionality. All these measurements can be performed under additional compressive or tensile static loads to characterize the piezoelectric thin films and/or fully processed wafers with MEMS devices. Next step After successful qualification of the PZT layer, the customer can decide whether to continue using SolMateS’ facilities for processing wafers or select a production equipment for their own in-line production.
