SolMateS-Piezo is our new division specialized in customized production solutions for wafer processing. With a new PVD-technology thin films of PbZrTiOx (PZT) can be integrated with standard silicon process technology. Piezoelectric thin films (PZT) can be used for the movement on a chip, typical MEMS applications are; print-heads, micro-pumps, energy harvesters, tilt-table mirrors and ultrasound transducers. An industrial piezoelectric thin film production solution We provide a reliable competitive PVD process production solution to deposit PZT thin films on 4-6” wafers. Compared to other techniques (like Sol Gel) we deliver stable quality with highly reduced throughput times. Through demo processing & close collaboration, our team supports Piezo based MEMS development and a smooth integration in the existing production line. In house production We have equipment to deposit high quality PZT and oxide electrodes on 4-6”wafer. After the testing and evaluation phase we can become your reliable supplier of wafers with customized PZT thin films. In line production equipment To produce in high volumes we can integrate our production solution into your production line. Our HVM equipment for 4” and 6” wafers is expected to be available in the beginning of 2011.
