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Piezo MEMS Services

SolMateS offers PZT thin film services for development purposes. We provide 4", 6" and 8" wafers with high-quality PZT Thin Films. We also assist in thin film structuring and device characterization if customers wish to accelerate the development phase. SolMateS engineers have ample experience in fabricating test structures such as cantilevers and membranes.

For PZT etching, we offer our in-house developed chemicals Sol-Etcher & Sol-Cleaner. For all MEMS applications there is an optimal composition which can be easily tuned and optimized with our technology. Please contact us for more information.

 

 

 

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