SolMateS PIEZO provides solutions for the movement or sensing on a chip. We produce customized piezoelectric thin films and electrodes on several substrates. The goal is to have the first production system on the market at the end of 2010. With this machine PZT thin films as well as oxide electrodes can be deposited on Si-substrates. Currently thin films are optimized for customer needs and produced in low-volumes. To optimze thin film properties our engineers  design, fabricate and test prototype structures which can be scaled up for low and high volume production. SolMateS PIEZO delivers high quality piezo thin filmsto the MEMS-market.

Animation to demonstrate the developed Large Area Deposition Tool
To deposit complex oxide on substrates up to 200mm SolMateS has a developed two deposition facilities. Many companies have innovative ideas for new types of sensors and actuators based on piezoelectric functional elements, provided that these elements can be integrated in MEMS technology for cost and density reasons. PZT the most used piezoelectric material is crucial to produce devices such as: inkjet nozzles, ultrasonic imaging transducers, fluid/gas valves, flow sensors, accelerometers, micromotors and micropumps. SolMateS will provide the solution for inline deposition of high quality thin films for MEMS-fabs.

Transferring academic knowledge into innovation
Dr. Ing. Guus Rijnders is part of SolMateS as well as the project leader op Smart PIE at the University of Twente. This large research program is focused on the development of reliable technology and qualified procedures for integration of piezoelectric thin films into micro-electromechanical systems (MEMS) at an industrial level. In this project SolMateS is considered as the Foundry for PIEZO-MEMS. We will solve the academic questions and SolMateS will bring this available for the market with their unique and patented deposition facility.