SolMateS is currently optimizing their PZT thin films on 6" Si wafers for MEMS applications. These functional thin films can be used for various applications. SolMateS has the ability to deposit various PZT compositions. Furthermore we are working on metal and oxide electrodes. These high quality oxide electrodes prevent fatique. More information about the piezoelectric thin films is comming soon. It is expected to produce the first wafers with oxide electrodes this summer.

The piezoelectric thin films are deposited by a unique and patented depostion process which is illustred by the animation. If you have any questions or would like to have some wafers for testing purposes please contact us.