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The MESA+ institute of Nanotechnology in collaboration with NXP and Solmates has demonstrated functional MFM capacitors where the PZT was deposited with Solmates PLD on TiN (instead of Pt)
B. Kaleli , M.D. Nguyen, J. Schmitz , R.A.M. Wolters and R.J.E. Hueting.
To read the full article go to Science Direct.