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Ca₂Nb₃O₁₀ and Ti_0.87O₂ metal oxide nanosheets are used as a buffer layer for epitaxial growth of piezoelectric capacitor stacks on Si and Pt/Ti/SiO2/Si substrates by Pulsed Laser Deposition. The results of this research show a route toward the fabrication of single crystal piezoelectric thin films and devices with high quality, long-lifetime piezoelectric capacitor structures on nonperovskite and even noncrystalline substrates such as glass or polished metal surfaces.

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